Semi-Automatic Wafer Prober System for Characterization of 200-mm Wafers

The subject of the procurement is the supply, installation and commissioning of a semi-automatic wafer prober system for the electrical and high-frequency characterization of 200-mm wafers for research and laboratory use at IHP. The system shall include, among other components, a 200-mm wafer prober with vacuum chuck and precision positioning, individual probes, multi-contact probes for RF measurements up to at least 6 GHz, a probe card system, automated microscopy and camera equipment, as well as control and software components. The scope of supply also includes transport, installation, commissioning, training, documentation, warranty and spare-parts supply.