Glovebox Integrated Evaporation Line

The system consists of 4 interconnected gloveboxes; GB_EVAP#1_CHAR suits characterization purposes under inert atmosphere, the remaining 3 gloveboxes — GB_EVAP#2_TPL, GB_EVAP#3_PERO, GB_EVAP#4_M+O, each of them containing one evaporation chamber, provide the necessary processes for producing perovskite thin film solar cells under inert conditions. Reference processes/parameters are listed in the table below. The transfer of the cells between all locations of the system must be guaranteed without leaving the inert atmosphere. The glovebox-line has to fit into a laboratory with the size shown in the floor plan. Escape ways must be maintained according to ‘Technische Regeln für Arbeitsstätten Fluchtwege und Notausgänge, Flucht- und Rettungsplan’ — ASR A2.3 for up to 5 people. All evaporation chambers must be capable of co-deposition involving all installed sources. The standard substrate dimension for all processes is 156 x 156 mm2 and 3 mm max thickness. Mounting plates for an ALD device on GB_EVAP#4_M+O and for feedthroughs for characterization on GB_EVAP#1_CHAR have to be installed. The whole glovebox-line can share one atmosphere, so one single O2/H20 filtersystem is sufficient, provided it is powerful enough to maintain low O2 and H20 levels in all 4 gloveboxes. For controlling the co-deposition processes in all chambers, a detailed software-specification is provided as part of the tender document. The quote has to refer explicitly to every single specification listed in this document.