Dualbeam Xenon Plasma Focused Ion Beam

Electron Beam Optics and Control Schottky Field Emission source Imaging resolution: 1 nm Accelerating voltage: 350 V – 30 kV Ion Beam Optics and Control Ion source: Xe Plasma source Detection: ETD and ICE detectors Imaging resolution: < 20 nm Accelerating voltage: 2 kV to 30 kV Beam current: 1.5 pA to 2.5 μA in 20 steps Beam current stability: < 5 % of total beam current/hour Beam blanking Beam shift after aperture change: < 1 μm Detectors In-chamber detector(s) for secondary electron and secondary ion imaging In-lens TLD with SE and BSED Modes Elstar’s immersion mode with beam deceleration Back scattered detector ICE Detector 4 Channel detector amplifier Retractable STEM detector with imaging capability in BF, DF, HAADF modes Electron backscattered diffraction detector for orientation mapping Scan and Image Characteristics Continuous and single scans Averaged or integrated scans Magnification: roughly 50 to 200 kX, stepped and/or continuous Scan rotation Real-time image averaging.