Delivery, Installation and Commissioning of a thin film sputter deposition tool.

A planetary sputter-up system with base vacuum better than 3x10-8 mbar. The system should consist of 5-6 sample holder positions for sputter deposition including 4 single 3 inch magnetron guns with 4 DC + 2 RF power supplies and 1 confocal cluster with 4 magnetrons for 2 inch targets each, with 4 DC and 2 RF power supplies, one optional spare deposition position for later upgrades. If power supplies for 2 and 3 inch guns are identical and inter-changeable then a total of 7 DC and 3 RF power supply units for all 8 sputter sources will be sufficient. Max. power for DC power supplies is 1 kW. The magnetrons with water cooling and individual gas inlets should be able to sputter also ferromagnetic materials. Many window ports and additional ports where possible for optional upgrades and extensions and additionally a user-friendly software for automated operation (e.g. for multilayer-deposition) should be included.