Beschaffung einer Photolithographie Ausstattung

Nationale Ausschreibung nach VOB/A Vorinformation 1. Öffentlicher Auftraggeber Name und Anschrift: Martin-Luther Universität - Abteilung 2 - Finanzen Universitätsplatz 10 06108 Halle (Saale) Telefonnummer: [Nummer entfernt]; E-Mail: [E-Mail-Adresse entfernt] Faxnummer: [Nummer entfernt] Internet: 2. Vergabeverfahren Freihändige Vergabe 3. Auftragsgegenstand: Beschaffung einer Photolithographie Ausstattung 4. Ort der Ausführung Martin-Luther-Universität Halle-Wittenberg Institut für Pharmazie // Biopharmazie [Name entfernt] / R418 Kurt-Mothes-Str. 3 06120 Halle (Saale) 5. Art und voraussichtlicher Umfang der Leistung: Spezifikationsverzeichnis: Mask-based experimental photolithography equipment Suppliers are requested to present that the respective specifications are fulfilled by a comparative table. A compatible set of equipment should be purchased that allows the preparation of PDMS-based microfluidic chips on an experimental scale. The compatible set of equipment should have an expected life time of operation > 10 years and allow: (i) the preparation of homogeneous films of SU-8 resins of different thicknesses in the lower (5 µm) to medium (500 µm) micrometer size range on silicon or glass wafers up to 4 inches in diameter (ii) heating the SU-8 films with suitable temperature programs for solvent removal and internal stress reduction (iii) the mask-based UV crosslinking of the SU-8 resin with high resolutions; followed by development/removal of non-crosslinked regions leading to a positive structure (iv) transfer of microstructures into PDMS avoiding gas bubbles and other irregularities (negative structure) (v) bonding of negative PDMS structures to glass to close the microfluidic channels The following table provides an overview about individual components that the compatible set of equipment may contain. Deviations from this table are possible if justified, e.g. if offered pieces of equipment can cover several fabrication steps or an alternative technique is compatible in terms of resolution and lifetime of operation. Deviations should be explained. The set-up of the equipment is planned for a chemistry lab with one fume hood (internal dimensions: 120 cm width, 60 cm depth, 145 cm height), available bench space 2-3 meters (not ventilated), and supply of compressed air (6 bar). Electrical supply 230 V, 50 Hz. This lab is not a clean room and has exposure to day light. A desiccator with vacuum port and an ultrasound water bath for cleaning are available. Possible components of the compatible set of photolithography equipment: Spin coater: solvent compatible housing (e.g. polypropylene), suitable holding mechanisms for wafers with alignment mechanisms for homogeneous film thickness, easily cleanable chamber or comparable concept (e.g. liners), compatible with wafers of 1 to >= 4 inches, electronical control of rotation speeds (programmable) up to >= 12 000 rpm; accessory equipment if necessary for operation Programmable hot plate operable from room temperature to >= 400 °C suitable for >= 4 inch wafers, programmable temperature ramps and holding times, temperature precision 1 K, easily cleanable surface (e.g. smooth aluminum); cover for light protection if necessary; accessory equipment if necessary for operation High collimated UV-irradiation system in light protection housing (working safety) suitable for 4 inch wafers; LED or other lamp with defined wavelength and intensity suitable for SU-8 resin crosslinking at reasonable process times; Low angle of divergence ≤ 2° allowing high resolutions of formed microstructures (< 5 µm); compatible with glass or plastic photomasks; accessory equipment if necessary for operation Oven for PDMS curing, 2 shelfs, temperature range room temperature to >= 150 °C; chamber dimensions >15x15x15 cm (depth x width x height) to fit 15 cm diameter petri dishes; accessory equipment if necessary for operation Plasma cleaner (air plasma; port for oxygen) for bonding PDMS to glass with >= 15 cm diameter chamber, automatic pressure controller with pressure range about 300-1000 mTorr; integrated or attached vacuum pump; accessory equipment if necessary for operation Online support for set-up and operation, software (if required), and manual (German or English language) for all components are to be included 6. Voraussichtlicher Zeitraum der Ausführung: Fertigstellung der Leistungen bis: Dauer der Leistung: Schnellstmöglich ggf. Beginn der Ausführung: 7. Sonstiges: Fragen zur Vergabe und die Durchführung werden durch die Vergabestelle beantwortet. Die Beschaffung soll als freihändige Vergabe durchgeführt werden und die Angebotsaufforderung soll voraussichtlich ab 06.12.2022 an alle interessierten Bieter versandt werden. Alle informationen zur Vergabe und ein detailliertes Leistungsverzeichnis wird mit der Angebotsaufforderung zur Verfügung gestellt. Elektro ,Möbel (Sonstige)